JPS6141235Y2 - - Google Patents
Info
- Publication number
- JPS6141235Y2 JPS6141235Y2 JP7215182U JP7215182U JPS6141235Y2 JP S6141235 Y2 JPS6141235 Y2 JP S6141235Y2 JP 7215182 U JP7215182 U JP 7215182U JP 7215182 U JP7215182 U JP 7215182U JP S6141235 Y2 JPS6141235 Y2 JP S6141235Y2
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- horseshoe
- shaped spring
- peripheral edge
- wafer holder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000002093 peripheral effect Effects 0.000 claims description 5
- 235000012431 wafers Nutrition 0.000 description 57
- 150000002500 ions Chemical class 0.000 description 3
- 239000010935 stainless steel Substances 0.000 description 3
- 229910001220 stainless steel Inorganic materials 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 235000012489 doughnuts Nutrition 0.000 description 2
- 238000005468 ion implantation Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 230000007723 transport mechanism Effects 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7215182U JPS58175635U (ja) | 1982-05-18 | 1982-05-18 | ウエハホルダ− |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7215182U JPS58175635U (ja) | 1982-05-18 | 1982-05-18 | ウエハホルダ− |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58175635U JPS58175635U (ja) | 1983-11-24 |
| JPS6141235Y2 true JPS6141235Y2 (en]) | 1986-11-25 |
Family
ID=30081725
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7215182U Granted JPS58175635U (ja) | 1982-05-18 | 1982-05-18 | ウエハホルダ− |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58175635U (en]) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4658692B2 (ja) * | 2005-05-31 | 2011-03-23 | ルネサスエレクトロニクス株式会社 | ウエハ保持治具 |
-
1982
- 1982-05-18 JP JP7215182U patent/JPS58175635U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS58175635U (ja) | 1983-11-24 |
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